Deep Level Transient Spectroscopy (DLTS) with Boonton 7200 Capacity Meter Webinar
Broadcasted on 2/16/2011
Wolfgang Damm, Wireless Telecom Group
Deep-level transient spectroscopy (DLTS) is an experimental tool for studying electrically active defects in semiconductors. DLTS allows researchers to define defect parameters and measure the concentration of those defects in space charge region of simple electronic devices, typically Schottky diodes or p-n junctions. DLTS has a higher sensitivity than almost any other semiconductor diagnostic technique available.